Clean Air Module
- Air handling unit for smallest air flows

Temperature and humidity control are specially adapted for the operation with small air flows. The air is generated be decompression of compressed air that is externally supplied to the system.

The cooling operates thermoelectrically without external cooling water. For humidification the carrier gas (compressed air) is together injected with DI-water in a moisturizer cell. Herewith a very precise control of the moisture can be achieved.

Particles and volatile organic compounds (VOC) are eliminated by use of a multistage filtration system. Downstream processes thus  can be kept free from contamination at highest level.